Class Schedule

Instructor: Wen J. LI (wen@mae.cuhk.edu.hk; Phone: 852-2609-8475; Office: MMW 422)
   
Reference Books:  See http://www.acae.cuhk.edu.hk/~ace5090
Text Book:  Fundamentals of Micromachine Engineering, by Wen J. LI, 2001, unedited version. Can be downloaded without cost for ACE5090 and ACE7490 students.
Grading:  20% Homework (4)
60% Midterm Exams (2)
20% Group Report 
Intended class topics:  Itroductions to micro systems; micro-fabrication technologies; layout design tools for MEMS; sensor principles; actuator principles; issues of micro systems integration, nano technology.

 
2002
Tentative Class Topics
Week 1
8-Jan
 Intro to Class; intro to IC and MEMS; history of MEMS; video on MEMS.
11-Jan
 MEMS fabrication technologies: surface, bulk, LIGA, direct, and others.
Week 2
15-Jan
 MEMS fabrication technologies: surface, bulk, LIGA, direct, and others.
18-Jan
 MEMS fabrication tools: lithography, wet etching, dry etching, equipment.
Week 3
22-Jan
 MEMS fabrication tools: lithography, wet etching, dry etching, equipment.
25-Jan
 MEMS layout design tool: L-Edit with specific examples.
Week 4
29-Jan
 MEMS layout design tool: L-Edit with specific examples.
HW 1 Due
1-Feb
 Macro and Micro worlds: comparison of physical scaling laws.
Week 5
5-Feb
 Macro and Micro worlds: comparison of physical scaling laws.
8-Feb
 Thin film mechanical properties.
Week 6
12-Feb
 Chinese New Year Vacation: Feb 11 to 16.
 
15-Feb 
 Chinese New Year Vacation: Feb 11 to 16.
Week 7
19-Feb 
 Thin film mechanical properties.
HW 2 Due
22-Feb
 Mechanical properties of silicon.
Week 8
26-Feb
 Force sensor principles and implementation: capacitive, piezoelectric, piezoresistive, optical.
Group Midterm Report Due
 
1-Mar
 Force sensor principles and implementation: capacitive, piezoelectric, piezoresistive, optical.
Week 9
5-Mar
1st Midterm Examination
8-Mar
 Actuator principles and implementation: thermal, electrostatic, magnetic.
Week 10
12- Mar
 Actuator principles and implementation: thermal, electrostatic, magnetic.
 
15-Mar
 Actuator principles and implementation: thermal, electrostatic, magnetic.
Week 11
19-Mar
 Foundry Services: MCNC (CRONOS) and MOSIS.
HW 3 Due
22-Mar
 Foundry Services: MCNC (CRONOS) and MOSIS.
Week 12
26-Mar 
 New materials for MEMS: ionic-conducting polymers; parylene; SAMs.
29-Mar 
 Easter Vacation: March 29 to April 1.
Week 13
     2-Apr  MEMS applications: automobile, portable projector, ink-jet printer (specific device studies).
 
5-Apr
 Ching Ming Festival: April 5.
Week 14
9-Apr
 MEMS applications: automobile, portable projector, ink-jet printer (specific device studies).
HW 4 Due
12-Apr
 MEMS applications: biomedical, optical networks, wireless communications (specific device studies).
Week 15
16-Apr
 Nano Technology: what is Nano Technology? Future applicatioins for Nano Technology; from MEMS to NEMS. 
19-Apr
2nd  Midterm Examination
26-Apr
Group Final Report Due