Introduction

Microelectromechanical Systems (MEMS) is a rapidly growing field that will  permeate and revolutionize our  lives in the coming millennium.  Silicon processing technology is providing the opportunity to create micro-machines and micro-sensors with performance that is often not possible with mainstream mechanical fabrication techniques. Commercial products such as portable projectors, HDTV, ink-jet printers, DNA chips, and force sensors are already available using MEMS technology. 

ACE5090 is an introductory course to this growing field for the final year and postgraduate students in mechanical engineering, electrical engineering, biology, and physics. The course will cover a wide range of subjects - including bulk and thin-film processing, MEMS CAE design, MEMS operational principles,  and an overview of  publicly available fabrication processes.